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THK Unveils Type CMX Ultra-Low Profile X-Y Open Frame Alignment Stage

Schaumburg, IL - (July 11, 2005) THK introduces another innovation in the world of high accuracy positioning with its low-profile Type CMX Alignment Stage.

The new stage incorporates a patent pending X-Y module design, where four hollow modules are sandwiched between, and at each corner of, a base plate and a top table. Large through openings are included to allow complete access from the top and bottom of the stage. The use of X-Y modules enabled THK to design this 3-axis stage with only the two main plates with large openings. This results in a significant reduction in weight and height, even for the line's largest standard table size of 1500mm x 1500mm.

Each module contains a THK pre-loaded Cross LM Guide Type CSR for the XY table motion, as well as a Cross Roller Ring that couples the XY motion of each module to the top table. This allows relative rotation of the top table without any need for a rotary table.

The Type CMX Alignment Stage produces its simultaneous X-Y and rotary motion with positioning repeatability of ±1.0-m and up to 30-m parallelism when the stage's three servo motors are driven in various combinations. Minimum resolution is 0.12-m and maximum carrying mass exceeds 150 kg. The Type CMX is an ideal choice for automated inspection/production of: large flat panel displays, semiconductors, screen printing, and many other applications where critical alignment motion is required from a low-profile / lightweight X-Y platform.

To learn more please contact Technico, Inc.

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